Class / Patent application number | Description | Number of patent applications / Date published |
250442110 | With object moving or positioning means | 64 |
20080283768 | Transfer mechanism for transferring a specimen - The invention relates to a transfer mechanism for transferring a specimen ( | 11-20-2008 |
20080302974 | OPTICAL AUTO FOCUSING SYSTEM AND METHOD FOR ELECTRON BEAM INSPECTION TOOL - A method and system for inspecting a semiconductor wafer. The method includes providing an illumination flux through a pattern plate and a lens to a surface of a specimen to project a pattern onto the surface of the specimen. The pattern is associated with the pattern plate. Additionally, the method includes detecting the illumination flux reflected from the surface of the specimen with a detector, processing information associated with the detected illumination flux, and generating a first image based on at least information associated with the detected illumination flux. The first image includes a first image part for the pattern and a second image part for the specimen. Moreover, the method includes adjusting the lens to a state in order to achieve a first predetermined quality for the first image part, and moving the specimen to a first position. | 12-11-2008 |
20090014664 | Specimen Holder for Electron Microscope - The present invention provides a specimen holder for use with an electron microscope. The specimen holder has a retainer mounted at the front end of the body of the specimen holder. The retainer has a plate member provided with a hole around its front end. The hole provides a reference in securing the whole specimen for a desired field of view. A circular groove is formed in the plate member and used to place the specimen in position. Any members lying perpendicularly to the tilted axis at the position of the specimen are cut out. | 01-15-2009 |
20090039285 | Method and device for controlling and monitoring a position of a holding element - A system for controlling and monitoring a position of a holding element, which is provided to hold a sample to be examined, is disclosed. The system may use a beam device, such as an electron microscope. The system provides for controlling and monitoring a position of a holding element taking into account any errors with respect to irregularities and may include interpolation of possible errors. | 02-12-2009 |
20090078885 | SAMPLE MANIPULATION DEVICE - The invention relates to a sample manipulation device comprising an observation unit, which is used to observe a sample and to select a target position at which a portion to be removed from the sample is located, and a specimen stage which receives the sample. | 03-26-2009 |
20090114842 | Sample preparing device and sample posture shifting method - After a certain direction of a sample piece is allowed to coincide with an intersection line made by two planes of a surface of the sample and a conical side plane obtained by rotating, around a manipulator rotation axis, a line segment which is vertical to the surface of the sample and of which one end is an intersection of the surface of a sample and the manipulator rotation axis, the sample piece is supported by a manipulator and the manipulator rotation axis is operated. | 05-07-2009 |
20090121152 | INSPECTION METHOD FOR SEMICONDUCTOR WAFER AND APPARATUS FOR REVIEWING DEFECTS - An object of the present invention is to provide a suitable method of observing a wafer edge by using an electron microscope. The electron microscope includes a column which can take an image in being tilted, and thus allows a wafer edge to be observed from an oblique direction. | 05-14-2009 |
20090127474 | ELECTRIC CHARGED PARTICLE BEAM MICROSCOPE AND MICROSCOPY - An electric charged particle beam microscope is provided in which a specimen movement due to a specimen rotation is classified into a repeatable movement and a non-repeatable movement, a model of movement is determined for the repeatable movement, a range of movement is determined for the non-repeatable movement, the repeatable movement is corrected on the basis of the movement model through open-loop and the non-repeatable movement is corrected under a condition set on the basis of the range of movement. | 05-21-2009 |
20090146075 | Motorized Manipulator for Positioning a TEM Specimen - The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the manipulator comprising a base ( | 06-11-2009 |
20090166557 | Charge control apparatus and measurement apparatus equipped with the charge control apparatus - The invention solves charge nonuniformity of a specimen surface resulting from emission variation of a carbon nanotube electron source and individual difference of emission characteristics. During charge control processing, charge of the specimen surface is measured in real time. As means for solving charge nonuniformity resulting from nonuniformity of electron illumination density, electrons illuminating the specimen and the specimen are moved relatively to average electron illumination density. Moreover, an absorption current flowing into the specimen and the numbers of secondary electrons emitted from the specimen and of backscattered electrons are measured as means for monitoring charge of the specimen surface in real time. | 07-02-2009 |
20090166558 | Phase Contrast Electron Microscope Device - A confocal method in which a sample is disposed in the center, a collective lens and a front objective lens are disposed on the incident side, and a back objective lens and a projection lens are disposed symmetrically on the outgoing side is so configured that a spatial filter can be inserted in front of the sample and behind it. As a result, the advantage of the confocal method, which is in the possibility of disposing a spatial filter in front of the sample, is realized and the disadvantages of the conventional transmission phase contrast electron microscope (halo, electron beam loss) are eliminated, thereby providing a phase contrast electron microscope device that enables the establishment of an electron microscopy technology that makes it possible to view of a wide range of materials from material science to life science in a non-dyed state with a high contrast and a high resolution. | 07-02-2009 |
20090218509 | CHARGED PARTICLE BEAM APPARATUS - A charged particle beam apparatus can be constructed with a smaller size (resulting in a small installation space) and a lower cost, suppress vibration, operate at higher speed, and be reliable in inspection. The charged particle beam apparatus is largely effective when a wafer having a large diameter is used. The charged particle beam apparatus includes: a plurality of inspection mechanisms, each of which is mounted on a vacuum chamber and has a charged particle beam mechanism for performing at least an inspection on the sample; a single-shaft transfer mechanism that moves the sample between the inspection mechanisms in the direction of an axis of the single-shaft transfer mechanism; and a rotary stage that mounts the sample thereon and has a rotational axis on the single-shaft transfer mechanism. The single-shaft transfer mechanism moves the sample between the inspection mechanisms in order that the sample is placed under any of the inspection mechanisms. The rotary stage positions the sample such that a target portion of the sample can be inspected by the inspection mechanism under which the sample is placed, and the inspection mechanisms inspect the sample. | 09-03-2009 |
20090230319 | Specimen Stage-Moving Device for Charged-Particle Beam System - A charged-particle beam system is offered which is equipped with a Z-motion mechanism to enable tomography. The Z-motion mechanism includes a rotary disk having three tapering surfaces on which balls are nested. The rotary disk is rotated via a worm gear to cause the balls to go upward along the tapering surfaces. This pushes an overlying elevatable disk upward, i.e., in the Z-direction. Consequently, the specimen stage is pushed up in the Z-direction. | 09-17-2009 |
20090230320 | SCANNING PROBE APPARATUS - In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus. | 09-17-2009 |
20090236540 | STAGE AND ELECTRON MICROSCOPE APPARATUS - A sample stage for electron microscope according to an embodiment of the invention includes at least two actuators capable of expanding and contracting or capable of swinging for moving a target sample in a predetermined direction. With a coordination of the two actuators, various controls are available by combining the operations of the two actuators. Accordingly, a stage mechanism capable of reducing a stop drift as well as moving a stage can be provided. | 09-24-2009 |
20090242795 | Cryo-charging specimen holder for electron microscope - The present invention relates to a cryo-charging specimen holder for the electron microscope, particularly to a cryo-charging specimen holder for the electron microscope to hold various biological materials. The major feature of the invention is to charge the biological specimen and freeze the specimen at low temperature. The ice around the biological sample is also doped, so that after charging the doped ice surrounding the sample has a conductivity level comparable to that of conductor. Therefore, the sample can be embedded by the doped and charged ice obtaining the property of conductor, in order to be observed by the electron microscope. | 10-01-2009 |
20090242796 | SPECIMEN PRE-TREATMENT APPARATUS AND SPECIMEN HOLDER - In a specimen pre-treatment apparatus, a specimen support part is screwed in a hollow column casing part while facing a specimen support end toward the same direction as an open end of the hollow column casing part. A specimen holder is arranged so that the specimen support end which supports a specimen is opposite to an end portion of an anode (electrode). The change of the screwing depth can adjust a position of the specimen support part with respect to the hollow column casing part. Accordingly, it allows adjusting the distance between the specimen that is supported by the specimen support part and the end portion of the anode. | 10-01-2009 |
20090250625 | SPECIMEN STAGE APPARATUS AND SPECIMEN STAGE POSITIONING CONTROL METHOD - A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage. | 10-08-2009 |
20090283696 | Pre-Cryogenic Electron Microscope Specimen Holder - A pre-cryogenic electron microscope specimen holder is disclosed. The pre-cryogenic electron microscope specimen holder includes a specimen holding member and a cryogenic energy storing member. The cryogenic energy storing member further includes a liquid gas storing trench formed therein to store the liquid gas. The cryogenic energy storing member is disposed under the specimen holding member to further supply the cryogenic energy to the specimen to extend the observation time for the specimen in an electron microscope. | 11-19-2009 |
20090302234 | Method and Apparatus for Observing Inside Structures, and Specimen Holder - An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed. | 12-10-2009 |
20090309043 | CHARGED PARTICLE BEAM APPARATUS AND SAMPLE HOLDING SYSTEM - An object of the present invention is to obtain a charged particle beam apparatus that includes a simplified sample positioning mechanism used with an electrostatic chuck, allow the sample to be released easily when residual attraction occurs, and enable observation throughout an entire area on an outer peripheral portion of the sample. To attain the object, the present invention provides a charged particle beam apparatus including, in a sample holding system for holding a sample, an outer peripheral part for holding the sample at the outer peripheral portion on a backside of the sample and raising and lowering the sample; a drive portion for raising and lowering the outer peripheral part; an electrostatic chuck for attracting the backside of the sample; and a part for correcting an electric field that is of substantially the same height as the peripheral portion of the sample when the sample is attracted onto the electrostatic chuck. | 12-17-2009 |
20090314955 | Specimen Holder, Specimen Inspection Apparatus, and Specimen Inspection Method - A specimen holder is offered which can reduce the amount of chemical sprayed over a specimen consisting of cultured cells. The specimen holder has an open specimen-holding surface. At least a part of the specimen-holding surface is formed by a film and a tapering portion formed around the film. The specimen can be cultured on the specimen-holding surface of the film. The presence of the tapering portion can reduce the amount of used reagent. The specimen can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the specimen, such as cells, can be well observed or inspected in vivo while the specimen is being cultured. Especially, if an electron beam is used as the primary beam, the specimen can be well observed or inspected in vivo by SEM (scanning electron microscopy). | 12-24-2009 |
20100006771 | SPECIMAN HOLDER AND SPECIMAN HOLDER MOVEMENT DEVICE - It is an object of the present invention to provide a significantly beneficial specimen holder which allows mounting one or more specimens, for example, a specimen to be examined and a standard adjustment specimen for aberration correction in one specimen holder at the same time, thereby observing each specimens. The present invention is a specimen holder having a specimen holder movement mechanism for driving the specimen holder, wherein the specimen holder movement mechanism makes it possible to move the specimen holder approximately along the longer side of the specimen holder. In a preferred embodiment of the specimen holder according to the present invention, the specimen holder is characterized in that the specimen holder movement mechanism makes it possible to vary an insertion depth of the specimen holder into a tube for holding the specimen holder, with no relation to another specimen holder movement mechanism set for driving the specimen holder approximately along the longer side of the specimen holder. | 01-14-2010 |
20100032581 | MICRO-GRIPPER - A method is described for producing a micro-gripper, which comprises a base body and a gripping body connected integrally to the base body, which projects beyond the base body and provides a receptacle slot on a free end area in such a way that a micrometer-scale or sub-micrometer-scale object may be clamped in the receptacle slot for gripping and holding, as well as a micro-gripper according to the species. | 02-11-2010 |
20100140498 | OPERATION STAGE FOR WAFER EDGE INSPECTION AND REVIEW - The present invention relates to an operation stage of a charged particle beam apparatus which is employed in a scanning electron microscope for substrate (wafer) edge and backside defect inspection or defect review. However, it would be recognized that the invention has a much broader range of applicability. A system and method in accordance with the present invention provides an operation stage for substrate edge inspection or review. The inspection region includes top near edge, to bevel, apex, and bottom bevel. The operation stage includes a supporting stand, a z-stage, an X-Y stage, an electrostatic chuck, a pendulum stage and a rotation track. The pendulum stage mount with the electrostatic chuck has the ability to swing from 0° to 180° while performing substrate top bevel, apex and bottom bevel inspection or review. In order to keep the substrate in focus and avoid a large position shift during altering the substrate observation angle by rotation the pendulum stage, one embodiment of the present invention discloses a method such that the rotation axis of the pendulum stage consist of the tangent of upper edge of the substrate to be inspected. The electrostatic chuck of the present invention has a diameter smaller than which of the substrate to be inspected. During the inspection process the substrate on the electrostatic chuck may be rotated about the central axis on the electrostatic chuck to a desired position, this design insures all position on the bevel and apex are able to be inspected. | 06-10-2010 |
20100163746 | Irradiation device for material test using gamma ray from spent nuclear fuel assembly - The present invention relates to an irradiation device for material test using a gamma ray radiated from a spent nuclear fuel assembly and provides the irradiation device for material test using a gamma ray radiated from a spent nuclear fuel assembly wherein an irradiation device for material test to achieve a radiation effect evaluation is manufactured to be movable upward, downward and horizontally in order to study the hardening phenomenon of the frail materials to the radiation among the atomic power facilities using a gamma ray radiated from a spent nuclear fuel assembly, thereby it is possible to adjust a position of the spent nuclear fuel used for material test using a gamma ray radiated from a spent nuclear fuel and a test material, identify a distance between the spent nuclear fuel and the test material easily with a scale and evaluate the radiation effects on the materials used at facilities handling a spent nuclear fuel under the same situation as they are really exposed. Further the present invention comprises a support constructed vertically; a vertical moving table which is capable of moving upward and downward connected with a proper position of the support; a moving device for moving said vertical moving table upward and downward; a horizontal moving table which is capable of moving horizontally placed on the vertical moving table; a horizontal moving bar which is capable of moving horizontally placed on the vertical moving table; and a driving device for driving the horizontal moving table and the horizontal moving bar horizontally. | 07-01-2010 |
20100181495 | DEVICE AND METHOD FOR PREPARING SPECIMENS - A method and a device for preparing specimens for a cryo-electron microscope are described. A carrier is fixed to a holder, sample liquid is applied to the carrier, and a blotting device for removing excess sample liquid from the carrier by means of the absorbing medium is applied. The absorbing medium is illuminated with light and a change in the optical properties of the absorbing medium is detected by means of an optical sensor device. A control moves the blotting away from the carrier depending on a change in the detected optical properties. | 07-22-2010 |
20100224792 | METHOD FOR CHARACTERIZING VIBRATIONAL PERFORMANCE OF CHARGED PARTICLE BEAM MICROSCOPE SYSTEM AND APPLICATION THEREOF - A method of characterizing the vibrational performance of a charged particle beam microscope system having at least one encoder is disclosed. The encoder is part of a control system for controlling the speed of a stage whereupon a sample is secured for imaging. A plurality of images each corresponding to a specific encoder working frequency are analyzed to generate imaged pattern vibration amplitude information over an imaging time period. The generated imaged pattern vibration amplitude information is then transformed to generate an imaged pattern vibration amplitude information over a range of encoder working frequencies. Information of system vibrational performance is then derived from the encoder working frequency-based vibration amplitude information. As a result, the vibrational performance of the system is characterized to describe the system vibrational behavior in terms of imaged pattern vibration amplitudes at varying working frequencies of the encoder. | 09-09-2010 |
20100230608 | SAFE MOTION - The present invention relates to an inertial slider ( | 09-16-2010 |
20100230609 | SAMPLE CARRIER FOR SAMPLE HOLDER - The invention relates to a composite structure of a sample carrier | 09-16-2010 |
20100264330 | CHARGED PARTICLE BEAM APPLICATION APPARATUS - An apparatus capable of improving image quality by making it possible to suck specimens of different sizes electrostatically, and uniformalizing an electric field of a specimen edge portion, while suppressing increase in prime cost is provided. Specimen holding means is an electrostatic chuck, a master flat plane part surrounding a specimen of the largest size of specimen sizes, and an opening surrounding a specimen size except for the largest specimen size are included at an outer peripheral portion of the electrostatic chuck, a dummy specimen attachable to and detachable from the electrostatic chuck is included, and at a time of switching the specimen size, a dummy specimen is selected (or may be prevented from being used). | 10-21-2010 |
20100270476 | REACTION FORCE TREATMENT MECHANISM, XY STAGE APPARATUS, INSPECTION APPARATUS - The invention can provide a reaction force treatment mechanism used in a stage apparatus including a pedestal, a platen which supported by the pedestal through a vibration isolation unit, a mobile body which supported by the platen and moves on the platen, and an actuator which actuates the mobile body in one direction, the reaction force treatment mechanism including: a connection portion which connects a stator of the actuator to the pedestal through an stress relief mechanism for absorbing displacement in a direction different from the one direction; and a guide portion which movably guides the stator of the actuator in the one direction while restraining the stator of the actuator relative to the platen in a direction different from the one direction. | 10-28-2010 |
20110017922 | VARIABLE-TILT TEM SPECIMEN HOLDER FOR CHARGED-PARTICLE BEAM INSTRUMENTS - A variable-tilt specimen holder for a charged particle instrument having a tilt stage, where the tilt stage has a maximum range of tilt, a sample plate affixed to the tilt stage, and an ion-beam column having an ion-beam column axis. The variable-tilt specimen holder has a base for mounting to the sample plate, so that the base is substantially parallel to the tilt stage. Bearing blocks on the base rotatably support a pivot plate that has slots for holding TEM specimens or TEM grids holding specimens. The pivot plate is rotatable so that the TEM specimens held therein can be aligned with the axis of the ion beam column for thinning of the specimen. The pivot plate has a range of relation sufficient to move the preferred axis of thinning of the specimen from a first position where the tilt stage is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen and the axis of the ion beam column is greater than zero to a second position where the preferred axis for thinning of the specimen is substantially parallel to the ion-beam column axis. Clamps are provided to securely hold the TEM specimens or TEM grids. | 01-27-2011 |
20110180724 | SAMPLE TRANSFER DEVICE AND SAMPLE TRANSFERRING METHOD - A sample transfer device is provided which can insert to a charged particle beam apparatus a sample to be observed and analyzed under irradiation of a charged particle beam while suppressing to a minimum the time to expose the sample to the atmospheric environment. The sample transfer device for transferring the sample to be observed and analyzed by irradiating the charged particle beam comprises an expansible hollow member capable of accommodating a sample holder mounting the sample, a fixing member for fixing the sample holder within the expansible hollow member, and a sealing member communicating with the interior of the expansible hollow member to open/close an opening through which the sample holder passes. | 07-28-2011 |
20110198512 | CHARGED CORPUSCULAR BEAM APPARATUS - An object of the invention is to provide a charged corpuscular beam apparatus which is equipped with a static elimination mechanism suitable for eliminating electric charges deposited on front and back surfaces of a specimen. To achieve the foregoing object, there is proposed a static elimination mechanism which includes a first ionizer for eliminating electric charges from the front surface of the specimen, and a second ionizer for eliminating electric charges from the back surface of the specimen. The first and second ionizers are disposed in a mini-environment, and are arranged along a downflow in the mini-environment. A specimen carrying mechanism is disposed so that the specimen can pass between the two ionizers. | 08-18-2011 |
20110240881 | SPECIMEN HOLDER AND SPECIMEN HOLDER MOVEMENT DEVICE - The present disclosure significantly reduces the waiting time from inserting a specimen holder into an electron microscope until high quality data acquisition is possible. Characterizing the present disclosure, it is a specimen holder partly made of low thermal expansion material. The low thermal expansion material can be any of group 4, 5 or 6 in the periodic table of the elements. | 10-06-2011 |
20120119109 | SPECIMEN HOLDER WITH 3-AXIS MOVEMENT FOR TEM 3D ANALYSIS - Provided is a holder capable of a precise observation from 3 or more directions to analyze complicated internal structures of a specimen thereof, and more particularly, a specimen holder capable of a 3-axis movement for transmission electron microscope (TEM) 3D analysis that rotates cradles for supporting the specimen and moves the cradles back and forth and left and right, and freely changes directions of the specimen, thereby making it possible to more accurately analyze the specimen in three dimensions. | 05-17-2012 |
20120145920 | Stage Device - Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors | 06-14-2012 |
20120145921 | METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE - Provided is a method and an apparatus for inspecting a sample surface with high accuracy. Provided is a method for inspecting a sample surface by using an electron beam method sample surface inspection apparatus, in which an electron beam generated by an electron gun of the electron beam method sample surface inspection apparatus is irradiated onto the sample surface, and secondary electrons emanating from the sample surface are formed into an image toward an electron detection plane of a detector for inspecting the sample surface, the method characterized in that a condition for forming the secondary electrons into an image on a detection plane of the detector is controlled such that a potential in the sample surface varies in dependence on an amount of the electron beam irradiated onto the sample surface. | 06-14-2012 |
20120261589 | SEMICONDUCTOR INSPECTING APPARATUS - In the case of inspecting samples having different sizes by means of a semiconductor inspecting apparatus, a primary electron beam bends since distribution is disturbed on an equipotential surface at the vicinity of the sample at the time of inspecting vicinities of the sample, and what is called a positional shift is generated. A potential correcting electrode is arranged outside the sample and at a position lower than the sample lower surface, and a potential lower than that of the sample is applied. Furthermore, a voltage to be applied to the potential correcting electrode is controlled corresponding to a distance between the inspecting position and a sample outer end, sample thickness and irradiation conditions of the primary electron beam. | 10-18-2012 |
20130032732 | DEVICE TO LOAD TEM SAMPLE HOLDERS INTO A VACUUM CHAMBER - A device is described that allows for the insertion and removal of a Transmission Electron Microscope (TEM) specimen stage and insertion rod into and out of a vacuum chamber. The device can be configured to accommodate specimen stage and insertion rods manufactured by all TEM producers. The device has a side-entry slot for accepting the cylindrical stage rod and a locking mechanism, such that unwanted contact with the specimen and the specimen stage itself is avoided during entry and exit from the plasma vacuum chamber. The devices hold said specimen stage and insertion rod in position during the process of plasma cleaning in a vacuum chamber. | 02-07-2013 |
20130082190 | STAGE APPARATUS - Fluctuation in speed when a stage with a sample mounted thereon is moved at low speed is reduced such that an image to be observed is moved at constant speed when performing high-magnification observation using a scanning electron microscope. A control amount is obtained by compensation means from the deviation between position information obtained from position information detected by position detection means through a first low-pass filter and a command value obtained by integrating a speed command value input from stage operation input means and through a second low-pass filter having the same frequency characteristic as the first low-pass filter, and a driving signal to be output to driving means is generated from the added value of the control amount and the speed command value by waveform output means. | 04-04-2013 |
20130105706 | Double Tilt Transmission Electron Microscope Sample Holder for In-Situ Measurement of Microstructures | 05-02-2013 |
20130112893 | CHARGED PARTICLE BEAM DEVICE, DEFECT OBSERVATION DEVICE, AND MANAGEMENT SERVER - Provided is a charged particle beam device that prevents the increase in processing trouble caused by deterioration in the reviewing performance (e.g., overlooking of defects) by detecting an operation abnormality affecting the performance of the device or a possibility of such an abnormality in the middle of a processing sequence of a sample and giving a feedback in real time. In each processing step of the charged particle beam device, monitoring items representing the operating status of the device (control status of the electron beam, an offset amount at the time of wafer positioning, a defect coordinate error offset amount, etc.) are monitored during the processing sequence of a sample and stored as history information. In the middle of the processing sequence, a comparative judgment between the value of each monitoring item and the past history information corresponding to the monitoring item is made according to preset judgment criteria. When the width of fluctuation from the past history information deviates from a reference range, an alert is issued. | 05-09-2013 |
20130119267 | IN SITU HOLDER ASSEMBLY - An in situ optical specimen holder is disclosed which allows imaging and analysis during dynamic experimentation. This holder assembly includes a set of focusing and reflection optics along with an environmental cell. Electromagnetic radiation can be used to optically excite the specimen in the presence or absence of fluid and the source of such radiation may be located within the body of the holder itself. The spot size of the irradiation at the specimen surface can be varied, thus exciting only a specific region on the specimen. The window type cell provides a variable fluid path length ranging from the specimen thickness to 500 μm. The holder has the provision to continuously circulate fluids over the specimen. The pressure within the cell can be regulated by controlling the flow rate of the fluids and the speed of the pumps. | 05-16-2013 |
20130126750 | CHARGED PARTICLE DEVICE - A charged particle device that can prevent an effect of a vibration and suppress relative displacement between a charged particle generator and a specimen stage without reducing a movement range of the specimen stage is achieved. The charged particle device ( | 05-23-2013 |
20130153785 | METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING - An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput. | 06-20-2013 |
20130248735 | COMPOSITE CHARGED PARTICLE BEAM APPARATUS - Provided is a composite charged particle beam apparatus, including: an electron beam column for irradiating a sample with an electron beam; an ion beam column for irradiating the sample with an ion beam to perform etching processing; a sample stage drive portion for moving a sample stage in an irradiation axis direction of the electron beam; and a column adjusting portion for moving the ion beam column relatively to a sample chamber such that the sample is irradiated with the ion beam at a position irradiated with the electron beam. | 09-26-2013 |
20140061502 | SPECIMEN HOLDER FOR HOLDING A SEMICONDUCTOR DEVICE DURING A SAMPLE PREPARATION PROCEDURE CARRIED OUT USING FIRST AND SECOND SAMPLE PREPARATION APPARATUSES - A specimen holder is configured to hold, during a sample preparation procedure carried out using first and second sample preparation apparatuses, a semiconductor device to be analyzed using an electron microscope. The specimen holder includes a holding portion having a support configured to support the semiconductor device; and a supporting portion configured to releasable support the holding portion. The supporting portion includes an engaging element configured to couple the specimen holder into the first and second sample preparation apparatuses during the sample preparation procedure, and a guide configured to enable the holding portion to slide within the guide and vary a position of the holding portion with respect to the supporting portion. | 03-06-2014 |
20140091232 | CHARGED PARTICLE BEAM APPARATUS AND ELECTROSTATIC CHUCK APPARATUS - To improve an apparatus reliability by applying a voltage suitable to a situation, a charged-particle-beam apparatus | 04-03-2014 |
20140158907 | Specimen Positioning Device, Charged Particle Beam System, and Specimen Holder - A specimen positioning device ( | 06-12-2014 |
20140231670 | TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE - A multiple degree of freedom sample stage or testing assembly including a multiple degree of freedom sample stage. The multiple degree of freedom sample stage includes a plurality of stages including linear, and one or more of rotation or tilt stages configured to position a sample in a plurality of orientations for access or observation by multiple instruments in a clustered volume that confines movement of the multiple degree of freedom sample stage. The multiple degree of freedom sample stage includes one or more clamping assemblies to statically hold the sample in place throughout observation and with the application of force to the sample, for instance by a mechanical testing instrument. Further, the multiple degree of freedom sample stage includes one or more cross roller bearing assemblies that substantially eliminate mechanical tolerance between elements of one or more stages in directions orthogonal to a moving axis of the respective stages. | 08-21-2014 |
20140319371 | SAMPLE HOLDER AND CHARGED PARTICLE BEAM APPARATUS USING SAME - The disclosed invention provides a sample holder capable of reducing or preventing the influence of a charged particle beam deflected by applying a magnetic field to a sample and provided with means for simply switching between a mode of observing a sample while applying a magnetic field to the sample, and a mode free of a magnetic field in which a magnetic field becomes zero completely. The sample holder includes a magnetic field generating element including three or more magnetic gaps for applying a magnetic field to a sample, a cantilever-beam-shaped sample holding element that holds a sample on one end thereof, and a moving mechanism that adjusts a relative position between a sample and a magnetic gap. The magnetic gaps can be placed along an optical axis of a charged particle beam. | 10-30-2014 |
20150060695 | CHARGED PARTICLE BEAM APPARATUS - A charged particle beam apparatus includes: an electron beam irradiation unit irradiating a sample with electron beams having a first irradiation axis; a rotation stage holding the sample and having a rotation axis in a direction perpendicular to the first irradiation axis; an ion beam irradiation unit irradiating the sample with ion beams having a second irradiation axis that is substantially parallel to the rotation axis; a detection unit detecting at least one of charged particles and X rays generated via the sample by the irradiation with the ion beams and electron beams; and a gaseous ion beam irradiation unit irradiating the sample with gaseous ion beams. | 03-05-2015 |
20150137002 | Holder and Method for Fixing Observation Sample - A sample holder is provided allowing for favorable observation of a cross-sectional sample using a retarding method. The sample holder includes: a sample placement member on which a first fixing member, a cross-sectional sample as an observation sample, and a second fixing member are placed in contact with each other, and inserted inside the electronic optical lens barrel of an electron microscope; and a voltage introduction means for introducing a voltage to the sample placement member. The sample placement member has a positioning section for positioning the first fixing member, the cross-sectional sample, and the second fixing member onto a placement position. A positioning section positions the first planar surface of the first fixing member and the second planar surface of the second fixing member which are disposed respectively adjacent to the observation surface of the cross-sectional sample, parallel to the observation surface at locations equidistant from the observation surface. | 05-21-2015 |
20150144804 | Charged Particle Beam Apparatus - In many cases, the charged particle beam apparatus is used basically for observation at a magnification of 10,000 times or higher. It is thus difficult to recognize how the orientation of a sample seen with the naked eye corresponds to the origination of the sample appearing on an acquired image. This makes it difficult intuitively to grasp the tilt direction and other details of the sample. An object of this invention is to provide a charged particle beam apparatus allowing the orientation and the tilted state of the sample to be grasped intuitively. The apparatus includes: a charged particle beam source that emits a charged particle beam; a charged particle beam optical system that irradiates the sample with the charged particle beam; a platform on which the sample is placed; a stage capable of moving the platform at least in a tilt direction; a display unit that displays a tilted state of the platform by use of a simulated image of the platform; an operation input unit that allows a user to designate the position and direction of the sample for observation; and a control unit that controls the amount of movement of the stage based on a signal input from the operation input unit. | 05-28-2015 |
20150311034 | Method and Apparatus for Sample Extraction and Handling - An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput. | 10-29-2015 |
20150348743 | SAMPLE HOLDER - A sample holder according to an embodiment is a sample holder on which a sample to be observed with an electron microscope is mounted. The sample holder includes a support unit, a holder body, and a rotation mechanism. The support unit has a longitudinal direction and has a first end on which the sample can be mounted. The holder body holds the support unit at a second end on the opposite side from the first end. The rotation mechanism is provided inside the holder body and rotates the support unit with the longitudinal direction serving as an axis. A central axis of the holder body and a rotation axis of the support unit are axes in substantially same directions. | 12-03-2015 |
20150371817 | Device for Dust Emitting of Foreign Matter and Dust Emission Cause Analysis Device - In order to specify a dust emitting mechanism portion, a wafer must be provided near a mechanism portion in operation and the mechanism portion must be operated so that foreign matter sticks to a surface of the wafer. A mechanism that allows foreign matter to stick to a wafer by repeating operation of each of particular portions in a device and thus intentionally bringing about dust emission is provided. For example, the device includes a control device, a sample chamber in which a sample is processed, and a mechanism that loads and unloads a sample to and from the sample chamber, the mechanism has a plurality of portions, the control device has a script, and a particular portion of the plurality of portions of the mechanism is repeatedly operated as the control device executes the script. | 12-24-2015 |
20160005568 | Charged Particle Beam Apparatus, Stage Controlling Method, and Stage System - A stage system includes a stage that holds an object, a linear motor mechanism that moves the stage by a thrust force generated by a current flowing through the coil, and a control section that controls the current flowing through the coil. The current flowing through the coil in a state where the stage is maintained in the static state be greater than a minimum current amount required for generating the thrust force greater than a maximum static friction force of the stage with respect to the guide rails. | 01-07-2016 |
20160035535 | SAMPLE HOLDER, CHARGED PARTICLE BEAM APPARATUS, AND OBSERVATION METHOD - An object of the present invention is to provide a sample holder that can carry out a series of observations in which a rotational series image at arbitrary angles, namely, from −180° to +180° around the x-axis of an observation region and a rotational series image at arbitrary angles, namely, from −180° to +180° around the y-axis are obtained without taking a sample out of a sample chamber. | 02-04-2016 |
20160064181 | Device for Nanoscale Sample Manipulation - A manipulating device for manipulating sample objects having dimensions between about 10 nm and 10,000 nm. The device is attached to a top plate of a microscope, wherein the top plate moves along a Z-axis. The device further has first and second arms attachable to said top plate, wherein when attached the first and second are positioned relative to one another to grasp a sample object. The first and second arms are adapted to move along an X-axis and a Y-axis. The device further has a controller adapted to control movement of the first and second arms. | 03-03-2016 |
20160093464 | COMPOSITE CHARGED PARTICLE BEAM APPARATUS - A composite charged particle beam apparatus includes a first charged particle beam column that irradiates a thin sample with a first charged particle beam, a second charged particle beam column that irradiates an irradiation position of the first the charged particle beam of the thin sample with a second charged particle beam, and a sample holder that fixes the thin sample, and a sample stage on which the sample holder is mounted. The sample holder is able to rotate the thin sample within a surface parallel to an observation surface of the thin sample around a first rotational axis on the sample stage. | 03-31-2016 |
20190148105 | Charged Particle Beam Apparatus | 05-16-2019 |