Class / Patent application number | Description | Number of patent applications / Date published |
219121760 | Multiple beams | 22 |
20090045181 | SYSTEMS AND METHODS FOR PROCESSING THIN FILMS - The present disclosure is directed to methods and systems for processing a thin film samples. In an exemplary method, semiconductor thin films are loaded onto two different loading fixtures, laser beam pulses generated by a laser source system are split into first laser beam pulses and second laser beam pulses, the thin film loaded on one loading fixture is irradiated with the first laser beam pulses to induce crystallization while the thin film loaded on the other loading fixture is irradiated with the second laser beam pulses. In a preferred embodiment, at least a portion of the thin film that is loaded on the first loading fixture is irradiated while at least a portion of the thin film that is loaded on the second loading fixture is also being irradiated. In an exemplary embodiment, the laser source system includes first and second laser sources and an integrator that combines the laser beam pulses generated by the first and second laser sources to form combined laser beam pulses. In certain exemplary embodiments, the methods and system further utilize additional loading fixtures for processing additional thin film samples. In such methods and systems, the irradiation of thin film samples loaded on some of the loading fixtures can be performed while thin film samples are being loaded onto the remaining loading fixtures. In certain exemplary methods and systems, the crystallization processing of the semiconductor thin film samples can consist of a sequential lateral solidification (SLS) process. | 02-19-2009 |
20090188901 | Laser Material Processing System - A laser material processing system and method are provided. A further aspect of the present invention employs a laser for micromachining. In another aspect of the present invention, the system uses a hollow waveguide. In another aspect of the present invention, a laser beam pulse is given broad bandwidth for workpiece modification. | 07-30-2009 |
20100006549 | DEVICE FOR PROCESSING MATERIALS BY LASER BEAM - Disclosed is a laser processing device for processing a surface of an object with laser beams. The laser processing device includes: a laser beam generating unit for projecting laser beams; and a micromirror device having a plurality of micromirrors, the micromirrors being configured to reflect and transfer at least a part of laser beams projected from the laser beam generating unit to the surface of the object in a pattern for processing the surface of the object in a desired shape. The micromirrors of the micromirror device are capable of selectively switching the light path of the laser beams projected from the laser beam generating unit. According to the present invention, a surface of an object can be either two-dimensionally or three-dimensionally processed in a desired shape with laser beams. | 01-14-2010 |
20100264123 | Annealing apparatus using two wavelengths of continuous wave laser radiation - A thermal processing apparatus and method in which a first laser source, for example, a CO | 10-21-2010 |
20120279947 | LASER PROCESSING METHOD AND LASER PROCESSING APPARATUS - A laser beam machining method and a laser beam machining device capable of cutting a work along a predetermined cutting line on the surface of the work, wherein a pulse laser beam is irradiated on the predetermined cutting line on the surface of the work causing a multiple photon absorption with a condensed point arranged inside the work, and a modified area is formed inside the work along the predetermined determined cutting line by moving the condensed point along the predetermined cutting line, whereby the work can be cut with a small force by cracking the work along the predetermined cutting line starting from the modified area. | 11-08-2012 |
20140008340 | HYBRID ULTRAPRECISION MACHINING DEVICE AND HYBRID ULTRAPRECISION MACHINING METHOD - There is provided a hybrid ultraprecision machining device for manufacturing a micro-machined product from a workpiece, the machining device comprising: an electromagnetic-wave-machining means for roughly machining the workpiece; a precision-machining means for precisely machining the roughly machined workpiece, the precision-machining means being equipped with a replaceable cutting tool selected from the group consisting of a planar tool, a shaper tool, a fly-cutting tool, a diamond-turning tool and a micro-milling tool; a shape-measurement means for measuring a shape of the workpiece upon use of the electromagnetic-wave machining means and the precision-machining means; and a control means for controlling the electromagnetic-wave-machining means or the precision-machining means, based on information on the shape of the workpiece, the shape being measured by the shape-measuring means. | 01-09-2014 |
20140263222 | LASER MACHINING DEVICE FOR MACHINING NETTED DOTS - An laser machining device for laser forming netted dots uses a metal grating to divide a polarized laser beam or an unpolarized laser beam into a penetrating laser beam and a reflected laser beam, and the cooperation of fixed reflecting mirrors and rotatable reflecting mirrors guides the penetrating laser beam and the reflected laser beam onto two or more predetermined positions on a workpiece. | 09-18-2014 |
20140312017 | Method For Applying a Data Marking to the Surface of a Diamond or Brilliant and For Determining the Authenticity Thereof - A system and method are provided for marking valuable articles, particularly precious stones and here in particular cut diamonds (brilliants) and uncut diamonds. An identification marking that is invisible to the naked eye is applied to the article, and data associated with the identification marking is stored for subsequent use in determining the authenticity of the marking. The marking is applied by irradiating a surface of the article with laser light having a wavelength of less than 400 nm and applying ultrasonic oscillations during laser irradiation. A further laser light having a wavelength of more than 500 nm may also be applied to the surface. At least two interference images are generated using at least two different sounding radiation wavelengths for storage, along with an incidence angle of the sounding radiation. The stored data may subsequently be compared to authenticity-checking interference images to determine the authenticity of the identification marking. | 10-23-2014 |
20150053659 | Thermal processing by scanning a laser line beam - The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation. | 02-26-2015 |
20150144608 | HIGH DENSITY GALVO HOUSING FOR USE WITH MULTIPLE LASER BEAMS - A multi-beam laser processing system comprising a plurality of laser beams and a plurality of pairs of selectively rotatable mirrors for laser beam steering where each laser beam is independently steered by one pair of selectively rotatable mirrors. The plurality of pairs of mirrors are positioned adjacent to one another within a single main body. The main body is positioned directly opposing the beams, the mirrors directing each laser beam simultaneously to a selected location on a substrate. The main body comprises a plurality of vents; a plurality of passages; a plurality of openings; and a plurality of galvos nested densely within the main body. The galvos direct multiple laser beams to a substrate wherein the fields of view overlap and the laser beam focal point remains small and precise. | 05-28-2015 |
20150321286 | Device and method for laser material machining - The invention discloses a device for laser material machining, with at least two laser beam sources ( | 11-12-2015 |
20150352664 | Laser Patterning Skew Correction - A laser patterning alignment method provides a way to position a target at a working distance in a laser patterning system such that fiducial marks on the target are positioned in view of at least three laser patterning system cameras, and with each laser patterning system camera, to locate a fiducial mark on the target and sending location data of the located fiducial mark to a controller, to determine corrections required to align expected fiducial mark locations with the sent fiducial mark location data, and to adjust the laser patterning system with the determined corrections. | 12-10-2015 |
20160082546 | DEVICE FOR PREHEATING DURING WELDING AND METHOD - By the use of two lasers which are not mechanically connected to each other but the beams of which are then coupled to each other, it is possible to carry out preheating and remelting or melting in a very simple manner is provided. | 03-24-2016 |
219121770 | With sing source | 9 |
20090114629 | MULTIPLE BEAM MICRO-MACHINING SYSTEM AND METHOD - A system for delivering energy to a substrate includes a laser energy source providing a plurality of laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target. | 05-07-2009 |
20090314755 | Laser annealing apparatus - A laser annealing apparatus used in a crystallization process of an amorphous silicon thin film. The laser annealing apparatus includes a laser beam generation unit generating a laser beam, an optical system dividing the laser beam into a plurality of linear laser beams and including a focusing lens focusing the linear laser beams and projecting the focused linear laser beam on a substrate to be processed, and a focusing lens adjustment device adjusting a perpendicular distance and a rotation angle of the focusing lens relative to the substrate. | 12-24-2009 |
20110049114 | APPARATUS AND METHOD FOR WORKING A SURFACE OF A WORKPIECE BY MEANS OF LASER RADIATION - The present invention, among other things, relates to an apparatus ( | 03-03-2011 |
20130186871 | LASER PROCESSING MACHINE - A processing machine includes mirrors and to reflect a beam L oscillated from a laser oscillator to a predetermined surface on which a workpiece is arranged, optical axis operating mechanisms and to position an optical axis of the beam L at a desired target irradiation position by changing directions of the mirrors and, a camera sensor to capture an image of the target irradiation position and its periphery reflected in the mirror, and an error calibration mechanism to detect an error between the target irradiation position instructed to the optical axis operating mechanisms and an actual position of the optical axis of the beam L in the predetermined surface by referring to the image captured by the camera sensor. A correction amount to the optical axis operating mechanisms and is determined based on the error to irradiate the target irradiation position with the beam L during processing. | 07-25-2013 |
20140001164 | SYSTEMS AND METHODS FOR PROCESSING THIN FILMS | 01-02-2014 |
20140021178 | LASER MACHINING DEVICE - There is proposed a laser machining device ( | 01-23-2014 |
20140238963 | APPARATUS FOR MANUFACTURING MASK AND METHOD OF MANUFACTURING MASK USING LASER BEAM - A mask manufacturing apparatus includes a chamber, a laser beam irradiator, a stage, a cooling system, and a fan. The chamber provides an interior space therein. At least an upper wall of the chamber comprises a glass. The laser beam irradiator is disposed outside the chamber and configured to divide a laser beam into a plurality of sub-laser beams to irradiate the sub-laser beams onto a shadow mask material. The stage is disposed in the chamber and the shadow mask material is placed on the stage. The cooling system is configured cool the interior space. The fan configured to discharge heat generated in the interior space of the chamber to the outside of the chamber. Therefore, the shadow mask may be protected from overheating. | 08-28-2014 |
20150060421 | LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD - Metal is locally heated to a predetermined temperature within a predetermined time. | 03-05-2015 |
20160067823 | LASER MACHINING APPARATUS - A laser machining apparatus has a laser beam irradiation unit that includes: a pulsed laser oscillator that oscillates a pulsed laser beam at a given repetition frequency; first and second condensers that collect the pulsed laser beam oscillated by the pulsed laser oscillator; and a beam splitting unit arranged between the pulsed laser oscillator and the first and second condensers to split the pulsed laser beam oscillated by the pulsed laser oscillator and direct the resultant beams alternately toward the first and second condensers. The beam splitting unit includes a photoelastic modulator that has a piezo element and a synthetic quartz formed in one piece and modulates the laser beam so that a polarization plane of the laser beam is alternately at 0 and 90 degrees by applying, to the piezo element, a high frequency voltage at a frequency that matches the natural frequency of the synthetic quartz. | 03-10-2016 |