Class / Patent application number | Description | Number of patent applications / Date published |
073504140 | Elongated element with spaced supports | 22 |
20080236280 | FORCE REBALANCING AND PARAMETRIC AMPLIFICATION OF MEMS INERTIAL SENSORS - MEMS devices and methods for measuring Coriolis forces using force rebalancing and parametric gain amplification techniques are disclosed. A MEMS inertial sensor can include one or more proof masses, at least one sense electrode positioned adjacent to each proof mass, a number of torquer electrodes for electrostatically nulling quadrature and Coriolis-related proof mass motion, and a number of pump electrodes for producing a pumping force on the proof masses. Force rebalancing voltages can be applied to some torquer electrodes to electrostatically null quadrature and/or Coriolis-related proof mass motion along a sense axis of the device. A pumping voltage at approximately twice the motor drive frequency of the proof masses can be used to pump the proof masses along the sense axis. | 10-02-2008 |
20080276708 | Vibration Gyro Circuitry, Vibration Gyro Unit, and Method for Detecting Vibration Gyro Output - Vibration gyro circuitry, a vibration gyro unit, and a method for detecting a vibration gyro output, which enable detection of a rotational angular velocity with high sensitivity, are provided. The circuitry and the unit includes a differential amplifier circuit ( | 11-13-2008 |
20090056444 | ANGULAR VELOCITY DETECTING DEVICE - A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained. | 03-05-2009 |
20090071247 | COMPOSITE SENSOR AND ACCELERATION SENSOR - In an acceleration sensor, a first vibrator is arranged on a surface of a substrate such that the vibrator can vibrate in an X-axis direction. An angular-velocity-detecting vibrator is arranged inside the first vibrator such that the vibrator can be displaced in a Y-axis direction. A vibration generating unit and a vibration monitor unit are provided between the substrate and the first vibrator. An angular-velocity-detecting displacement detecting unit is provided between the substrate and the angular-velocity-detecting vibrator. A second vibrator is provided outside the first vibrator such that the vibrator can be displaced in the Y-axis direction. An acceleration-detecting displacement detecting unit is provided between the first and second vibrators. An angular velocity detecting circuit detects angular velocity by performing synchronous detection on a displacement detection signal from the displacement detecting unit using a monitor signal from the vibration monitor unit. On the other hand, an acceleration detecting circuit detects acceleration by performing synchronous detection on a displacement detection signal from the displacement detecting unit using a monitor signal from the vibration monitor unit. | 03-19-2009 |
20090205423 | ANGULAR VELOCITY SENSOR - An angular velocity sensor includes a supporting substrate, a detecting portion, a displacement detecting portion, a first driving portion, and a second driving portion. The detecting portion is supported by the supporting substrate movably in at least a free direction. The displacement detecting portion detects a displacement of the detecting portion in the free direction. The first driving portion excites a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis' force in the free direction is generated in response to an angular velocity about a first axis. The second driving portion excites a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis' force in the free direction is generated in response to an angular velocity about a second axis. | 08-20-2009 |
20100024549 | In-Plane Sensor, Out-of-Plane Sensor, and Method for Making Same - According to the present invention, an in-plane sensor comprises a structure unit which includes: a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end; and a movable structure including at least one proof mass which surrounds the fixed finger in a horizontal plane. | 02-04-2010 |
20100126272 | UNIAXIAL OR BIAXIAL MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED SENSITIVITY TO ANGULAR VELOCITY DETECTION - An integrated microelectromechanical structure is provided with: a driving mass, anchored to a substrate via elastic anchorage elements and moved in a plane with a driving movement; and a first sensing mass, suspended inside, and coupled to, the driving mass via elastic supporting elements so as to be fixed with respect to the driving mass in the driving movement and to perform a detection movement of rotation out of the plane in response to a first angular velocity; the elastic anchorage elements and the elastic supporting elements cause the detection movement to be decoupled from the driving movement. The elastic supporting elements are coupled to the first sensing mass at an end portion thereof, and the axis of rotation of the detection movement extends, within the first sensing mass, only through the end portion. | 05-27-2010 |
20100154543 | Microsystem, More Particularly a Microgyrometer, With at Least Two Mechanically Coupled Oscillating Masses - The microsystem achieved in a flat substrate and comprises two oscillating masses connected to the substrate by suspension springs. The oscillating masses are coupled by a rigid coupling bar so as to produce an anti-phase movement of said oscillating masses when excitation of the latter is performed in a predefined excitation direction. The coupling bar is connected to intermediate zones of the corresponding suspension springs arranged on opposite sides of the oscillating masses. The intermediate zones are arranged between a first end of the suspension springs fixed to the corresponding oscillating mass, and a second end of the suspension springs fixed to the substrate by a corresponding anchoring point. | 06-24-2010 |
20100186507 | MICROMECHANICAL ROTATION RATE SENSOR WITH A COUPLING BAR AND SUSPENSION SPRING ELEMENTS FOR QUADRATURE SUPPRESSION - A micromechanical rotation rate sensor including at least one substrate, wherein the base surface of the substrate is oriented parallel to the x-y plane of a Cartesian coordinate system, at least two seismic masses and in each case at least one suspension spring element for suspending the seismic mass from the substrate, wherein the at least two seismic masses are coupled to one another by at least one coupling bar, and at least one of the suspension spring elements includes at least two bar sections, which, in the undeflected state, are oriented essentially parallel to one another or are at an angle of less than 45° with respect to one another, and one or more connecting sections, which connect the bar sections to one another, wherein the bar sections can be displaced relative to one another in their longitudinal direction. | 07-29-2010 |
20100186508 | SENSOR DEVICE AND METHOD FOR MANUFACTURING A SENSOR DEVICE - A sensor device includes a base plate, a seismic mass having an upper side and a lower side that is situated such that given acceleration of the base plate the seismic mass is capable of being displaced in a direction oriented non-parallel to the upper side and/or to the lower side, at least one raised stop on the seismic mass, and a detection and evaluation device that is adapted to acquire a displacement movement of the seismic mass relative to the base plate and, taking into account the displacement movement, to determine an item of information relating to an acceleration of the sensor device and/or to a force acting on the sensor device, the seismic mass having at least one resilient area that includes the at least one stop and at least one displaceable remaining area, and the resilient area being connected to the remaining area via at least one spring. A method is for manufacturing a sensor device. | 07-29-2010 |
20100269589 | ANGULAR VELOCITY DETECTING DEVICE - A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is leviated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained. | 10-28-2010 |
20100281977 | MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE - An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection. | 11-11-2010 |
20100307245 | SUPPORT MEMBER OF VIBRATOR - The present invention provides, in a physical quantity measuring system using a vibrator, a supporting structure of a vibrator for reducing the zero-point temperature drift of detection signal. It is provided a supporting member for supporting a vibrator with bonding wires. The supporting member has a supporting plate with an opening formed therein to be positioned direct under a vibrator, and a bonding wire comprising a bonding end to be bonded with the vibrator, a fixed portion fixed on the supporting plate and a bent portion direct under the opening. A distance “L | 12-09-2010 |
20110174074 | FRAMED TRANSDUCER DEVICE - A MEMS device ( | 07-21-2011 |
20120096943 | MEMS GYROS WITH QUADRATURE REDUCING SPRINGS - Spring set configurations that include an advantageous combination of spring geometries are disclosed. Spring elements having curved and straight sections, orientation of spring element anchor points with respect to the common radius, orientation of spring element segments with respect to a specific axis, balance of the length of spring elements about the common radius, and mass balance about the common radius can be used to mitigate unwanted out of plane motion. The spring set provides planar motion while reducing undesired out of plane motion making MEMS devices substantially insensitive to the process-induced etch angle variations of the spring elements. The spring set can be used in a MEMS gyro device which maintains the desired resonant modes and consistently low quadrature error even with process variations in manufacturing causing undesirable etch angles. | 04-26-2012 |
20120125101 | MEMS DEVICE WITH IMPROVED SPRING SYSTEM - A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction | 05-24-2012 |
20120132001 | SPRING MOUNTING ELEMENT FOR AN ACCELEROMETER - A spring mounting element is provided having an inner ring with an inner radial circumference and an outer radial circumference, and an outer ring having an inner radial circumference and an outer radial circumference. A plurality of supporting elements are attached to and symmetrically disposed around the outer radial circumference of the inner ring, and attached to the inner radial circumference of the outer ring. The plurality of supporting elements allow the inner ring to move in three dimensions. | 05-31-2012 |
20130213134 | ANGULAR RATE SENSOR WITH SUPPRESSED LINEAR ACCELERATION RESPONSE - An angular rate sensor having two generally planar proof masses disposed along a drive axis in the plane of the masses, a sense axis perpendicular to the drive axis, and an input axis perpendicular to the plane of the masses. The masses are suspended from a pair of driving frames, which are mounted and constrained for anti-phase linear movement along the drive axis in drive-mode. Detectors responsive to the anti-phase movement of the masses in directions parallel to the sense axis in response to Coriolis forces produced by rotation of the masses about the input axis for monitoring rate of rotation about the input axis. | 08-22-2013 |
20130239683 | ANGULAR VELOCITY SENSOR - An angular velocity sensor includes a vibrator located along x-y plane specified by x direction and y direction that are orthogonal to each other; a substrate that is separated away from the vibrator along z direction perpendicular to the x-y plane; an anchor device extended from the substrate to the x-y plane in which the vibrator is located; a linkage beam device that links the anchor device to the vibrator, the linkage beam being able to twist about the y direction; an excitation portion that vibrates the vibrator along the z direction; and a detection portion that detects an angular velocity based on a displacement along the x direction of the vibrator. The vibrator includes a linkage region to link with the linkage beam device, and the linkage region becomes a wave node when the vibrator vibrates along the z direction. | 09-19-2013 |
20130239684 | VIBRATING GYROSCOPE - A vibrating gyroscope includes a frame body, first and second exciting members, detection members that detect vibration of the frame body, a first mass adding member, a second mass adding member, a first connecting member, and a second connecting member. The frame body includes first and second vibrating portions, first and second coupling portions, a first supporting portion, and a second supporting portion. The first and second coupling portions couple the first and second vibrating portions. The first supporting portion extends towards the second coupling portion from the first coupling portion. The second supporting portion extends towards the first coupling portion from the second coupling portion. The first and second exciting members and excite the first and second vibrating portions, respectively. The first and second mass adding members are provided at outer sides of the frame body, and are connected to the first and second vibrating portions, respectively. | 09-19-2013 |
20140047921 | EXTENSION-MODE ANGULAR VELOCITY SENSOR - An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode. | 02-20-2014 |
20150316379 | MEMS DEVICE WITH IMPROVED SPRING SYSTEM - A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction | 11-05-2015 |