TOKYO INSTITUTE TECHNOLOGY
TOKYO INSTITUTE TECHNOLOGY Patent applications | ||
Patent application number | Title | Published |
---|---|---|
20130063717 | LAMINATED STRUCTURE FOR MEASURING REFLECTED LIGHT INTENSITY, DEVICE CONTAINING LAMINATED STRUCTURE FOR MEASURING REFLECTED LIGHT INTENSITY, AND METHOD FOR MEASURING FILM THICKNESS AND/OR MASS AND/OR VISCOSITY OF THIN FILM - The present invention provides a laminated structure for measuring reflected light intensity able to measure the thickness of a surface adsorbed film with high sensitivity by a simple optical technique. | 03-14-2013 |