TAIWAN SEMICONDUCTOR MANUFACTURING COMAPNY, LTD.
|TAIWAN SEMICONDUCTOR MANUFACTURING COMAPNY, LTD. Patent applications|
|Patent application number||Title||Published|
|20150253083||ADAPTIVE BAKING SYSTEM AND METHOD OF USING THE SAME - An adaptive baking system includes a baking chamber configured to receive a wafer, and a heating element configured to support the wafer. The adaptive baking system further includes a controller configured to receive temperature information related to the heating element and the wafer, wherein the controller is further configured to adjust an amount of heat provided by the heating element during a baking process in response to the temperature information.||09-10-2015|
Patent applications by TAIWAN SEMICONDUCTOR MANUFACTURING COMAPNY, LTD.