STMicroeletronics S.r.I.
STMicroeletronics S.r.I. Patent applications | ||
Patent application number | Title | Published |
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20100163410 | ELECTRONIC DETECTION OF BIOLOGICAL MATERIALS - A hybridization detecting device, wherein a probe cell has a body of semiconductor material forming a diaphragm, a first electrode on the diaphragm, a piezoelectric region on the first electrode, a second electrode on the piezoelectric region and a detection layer on the second electrode. The body accommodates a buried cavity downwardly delimiting the diaphragm. | 07-01-2010 |