OSAKA VACUUM, LTD.
Osaka-shi, Osaka, JP
|OSAKA VACUUM, LTD. Patent applications|
|Patent application number||Title||Published|
|20150184665||MOLECULAR PUMP - A molecular pump includes a pump body provided with a turbo molecular pump portion, a control unit provided with a control portion and a power supply portion, and a cooling unit for cooling the pump body and the control unit. A first temperature detecting portion is provided in a first position, which is a position inside the control unit and has a low temperature. A second temperature detecting portion also serving as a humidity detecting portion is provided in a second position, which is a position inside the control unit and has a high temperature. The control portion controls the operation of the cooling unit in accordance with a relative humidity in the first position, calculated based on temperature information detected by the first temperature detecting portion and based on temperature information and humidity information detected by the second temperature detecting portion also serving as a humidity detecting portion.||07-02-2015|
|20140159526||RADIAL DIRECTION CONTROLLER AND MAGNETIC BEARING APPARATUS UTILIZING SAME - Provided is a radial direction controller capable of handling changes in negative bearing stiffness according to the mounting orientation. This radial direction controller, which is a magnetic bearing device that lifts and supports a rotating body by electromagnets, is equipped with: a radial control circuit for controlling displacement of the axis of the rotating body in the radial direction; a negative bearing stiffness elimination circuit that is connected in parallel with the radial control circuit and outputs a signal about the negative bearing stiffness; converters that output current values for controlling the electromagnets, based on the output signals from these circuits; filters that extract the DC component from the current values; computing units that compute correction coefficients based on the extracted DC components and the bias current of the electromagnets; and multiplication units that multiply the computed correction coefficients with the signal output from the negative bearing stiffness elimination circuit.||06-12-2014|
|20100078309||SPUTTERING METHOD AND SPUTTERING APPARATUS - A sputtering method is for forming, in a vacuum chamber, an initial layer on a film formation target object and then further forming a second layer on the initial layer therein, and the method includes: in the vacuum chamber, arranging surfaces of a pair of targets to face each other while distanced apart from each other at a preset distance and to be inclined toward the film formation target object placed at a lateral position between the targets, and then sputtering the targets by generating a magnetic field space on the facing surfaces of the pair of targets, and thus forming the initial layer on the film formation target object by using particles sputtered by the sputtering; and further forming the second layer on the film formation target object at a higher film forming rate than a film forming rate of the initial layer.||04-01-2010|
Patent applications by OSAKA VACUUM, LTD.