NuFlare Technology, Inc.
|NuFlare Technology, Inc. Patent applications|
|Patent application number||Title||Published|
|20150255249||MULTI CHARGED PARTICLE BEAM WRITING APPARATUS - A multi charged particle beam writing apparatus includes an aperture member to form multiple beams, a blanking plate in which there are arranged a plurality of blankers to respectively perform blanking deflection for a corresponding beam in the multiple beams having passed through a plurality of openings of the aperture member, a blanking aperture member to block each beam having been deflected to be in OFF state by at least one of the plurality of blankers, a first grating lens, using the aperture member as gratings, to correct spherical aberration of the charged particle beam, and a correction lens configured to correct high order spherical aberration produced by the first grating lens.||09-10-2015|
Patent applications by NuFlare Technology, Inc.