20110088846 | PLASMA SOURCE - A plasma source is disclosed. The plasma source includes: a disc-shaped core; “m” number of hubs, “m” being a positive integer, each hub extending a certain length in a horizontal spiral from the core and the hubs being arranged rotationally symmetrical to each other; and main coils each, in a continuous extension from an end of each of the hubs, winding a/m times in a horizontal spiral followed by a certain length of radial extension, winding a/m times in another horizontal spiral followed by a certain length of radial extension, and continuing this sequence in multiple repeats, and wherein “a” and “m” are positive integers. Therefore, the present disclosure contributes to the uniformity of the process under plasma by inducing uniform magnetic and electric fields presented over all. | 04-21-2011 |