KOBELCO RESEARCH INSTITUTE, INC.
|KOBELCO RESEARCH INSTITUTE, INC. Patent applications|
|Patent application number||Title||Published|
|20150248996||OXIDE SINTERED BODY AND SPUTTERING TARGET, AND METHOD FOR PRODUCING SAME - An oxide sintered body which is obtained by mixing and sintering zinc oxide, indium oxide, gallium oxide and tin oxide. The relative density of the oxide sintered body is 85% or more and the average grain size of crystal grains observed on the surface of the oxide sintered body is less than 10 μm. X-ray diffraction of the oxide sintered body shows that a Zn||09-03-2015|
Patent applications by KOBELCO RESEARCH INSTITUTE, INC.