20080297757 | Light-Modulating Nano/Micro Scale Aperture Array Device Having Immersion Layer and High Speed Nano Scale Pattern Recording System Using the Same - An optical modulating fine aperture array device is provided. The device includes a spatial light modulation unit provided with at least one light capacity cell arranged in a shape of a matrix, wherein each of the light capacity control cells is capable of individually controlling a degree of an inputted light which passing therethrough, a micro-lens array provided with at least one micro-lens arranged in a shape of a matrix, wherein each of the micro-lenses condenses the light passing through each of the light capacity control cells, a substrate made of an optical transparent material and having a thickness substantially to a focal length of the micro-lens, wherein the micro-lens array is attached to one side of the substrate, an aperture array arranged on other side surface of the substrate and provided with at least one fine aperture, wherein each of the fine apertures discharges light passing through the substrate by condensing the light by each of the micro-lenses and an immersion thin film layer made of an optically transparent dielectric, including and formed to have a predetermined thickness from the aperture array. | 12-04-2008 |