|Gigaphoton Inc. Patent applications|
|Patent application number||Title||Published|
|20150249312||LASER CHAMBER AND DISCHARGE EXCITATION GAS LASER APPARATUS - There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.||09-03-2015|
|20150246848||LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD - Included are a laser light source (||09-03-2015|
Patent applications by Gigaphoton Inc.