CREATIVE TECHNOLOGY CORPORATION Patent applications |
Patent application number | Title | Published |
20150371829 | PLASMA GENERATOR - A large-sized plasma generator is suited to various surface shapes and has a longer service life and improved energy conservation. An example of the plasma generator ( | 12-24-2015 |
20150295521 | ELECTROSTATIC CHUCK AND POWER SUPPLY SYSTEM - In an electrostatic chuck and a power supply system, high-voltage drive is performed without generating electrical discharge even in a vacuum atmosphere, and a structure of the power supply system for the electrostatic chuck is simplified. This power supply system includes: an electrostatic chuck ( | 10-15-2015 |
20150288302 | ELECTROSTATIC CHUCK, GLASS SUBSTRATE PROCESSING METHOD, AND SAID GLASS SUBSTRATE - An electrostatic chuck that enables high speed and high quality processing of a plate to be processed, and in which the weight of a base member is reduced and the strength thereof increased so as to maintain the flatness of the base member and prevent the plate to be processed from falling; a glass substrate processing method; and said glass substrate. An electrostatic chuck ( | 10-08-2015 |
20150268026 | WORKPIECE HOLDER AND METHOD USING SAME FOR DETECTING LATERAL DISPLACEMENT OF WORKPIECE - Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad ( | 09-24-2015 |
20130277357 | WORK HEATING DEVICE AND WORK TREATMENT DEVICE - Provided are a work heating device which is capable of heating a work piece with high soaking properties as well as fine temperature control and which remains highly reliable over a long-term use by preventing the deformation or the like of a chuck member, and a work treating device that uses the work heating device. The work heating device is a work heating device in which the chuck member including a work attraction electrode for work attraction and a heater member including a heating element for work heating are layered, and which is capable of heating with the heater member the work piece stuck by attraction on the chuck member side, in which the heater member includes a chuck attraction electrode for causing the chuck member to stick by attraction, between a surface of the heater member that is opposed to the chuck member and the heating element, so that the chuck member and the heater member are layered detachably. The work treating device is obtained by putting the work heating device on a base platform. | 10-24-2013 |
20110162526 | TWO-SIDED ATTRACTION STRUCTURE, EXHIBITING OR INDICATING APPARATUS USING SAME, DUST COLLECTING APPARATUS, AND PLANT GROWING APPARATUS - Provided is a two-sided attraction structure that can be used repeatedly with remarkable ease, thereby being free from the problem of material wasting or the like, is free from the problem of energy, and can be employed for various uses including an exhibition/information apparatus and a dust collecting apparatus. The two-sided attraction structure includes an electrostatic chuck portion ( | 07-07-2011 |
20100194012 | SUBSTRATE SUCTION APPARATUS AND METHOD FOR MANUFACTURING THE SAME - Provided is a substrate suction apparatus which has a vacuum suction mechanism and an electrostatic attraction mechanism, and improves planarity of a subject to be processed by improving uniformity in vacuum suction power. A method for manufacturing such substrate suction apparatus is also provided. A substrate suction apparatus ( | 08-05-2010 |
20090041980 | Electrostatic Chuck and Electrode Sheet for Electrostatic Chuck - An electrostatic chuck having excellent chucking force and holding force is provided. The electrostatic chuck includes a laminate structure in which a first insulating layer, a first electrode layer, an interelectrode insulating layer, a second electrode layer and a second insulating layer are successively laminated on a metal base in an order of increasing distance from the metal base. The second electrode layer includes a pattern electrode having a plurality of opening portions within a flat area, and a shortest distance X between mutually opening portions and a length L of a line segment formed by feet of perpendiculars when barycenters of the adjacent opening portions are projected to a virtual line which is a straight line parallel to the shortest distance X satisfy L/X≦1.5 and L<2.6 mm. | 02-12-2009 |