ASML Nertherlands B.V
ASML Nertherlands B.V Patent applications | ||
Patent application number | Title | Published |
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20150308966 | Method and Apparatus for Determining Lithographic Quality of a Structure - Method for determining lithographic quality of a structure produced by a lithographic process using a periodic pattern, such as a grating, detects lithographic process window edges and optimum process conditions. Method steps are: | 10-29-2015 |