AIR PRODUCTS AND CHEMICALS, INC.
|AIR PRODUCTS AND CHEMICALS, INC. Patent applications|
|Patent application number||Title||Published|
|20150249007||Methods to Prepare Silicon-Containing Films - Described herein are methods of forming dielectric films such as non-porous dielectric films, comprising silicon, oxide, and optionally nitrogen, carbon, hydrogen, and boron. Also disclosed herein are the methods to form dielectric films or coatings on an object to be processed, such as, for example, a semiconductor wafer.||09-03-2015|
|20150247673||Transient Heating Burner and Method - A transient heating burner including at least two burner elements each having a distribution nozzle configured to flow a fuel, and an annular nozzle surrounding the distribution nozzle and configured to flow an first oxidant, at least one staging nozzle configured to flow a second oxidant, and a controller programmed to independently control the fuel flow to each distribution nozzle such that at least one of the distribution nozzles is active and at least one of the distribution nozzles is passive, wherein an active distribution nozzle fuel flow is greater than an average fuel flow to the distribution nozzles and a passive nozzle fuel flow is less than the average fuel flow, and to control a staging ratio to be less than or equal to about 75%.||09-03-2015|
|20150247063||Chemical Mechanical Polishing (CMP) Composition for Shallow Trench Isolation (STI) Applications and Methods of Making Thereof - Methods for removing, reducing or treating the trace metal contaminants and the smaller fine sized cerium oxide particles from cerium oxide particles, cerium oxide slurry or chemical mechanical polishing (CMP) compositions for Shallow Trench Isolation (STI) process are applied. The treated chemical mechanical polishing (CMP) compositions, or the CMP polishing compositions prepared by using the treated cerium oxide particles or the treated cerium oxide slurry are used to polish substrate that contains at least a surface comprising silicon dioxide film for STI (Shallow trench isolation) processing and applications. The reduced nano-sized particle related defects have been observed due to the reduced trace metal ion contaminants and reduced very smaller fine cerium oxide particles in the Shallow Trench Isolation (STI) CMP polishing.||09-03-2015|
|20150246937||ORGANOAMINOSILANES AND METHODS FOR MAKING SAME - Organoaminosilanes, such as without limitation di-iso-propylaminosilane (DIPAS), are precursors for the deposition of silicon containing films such as silicon-oxide and silicon-nitride films. Described herein are methods to make organoaminosilane compounds, or other compounds such as organoaminodisilanes and organoaminocarbosilanes, via the catalytic hydrosilylation of an imine by a silicon source comprising a hydridosilane.||09-03-2015|
|20150240367||Electrolytic Apparatus, System and Method for the Efficient Production of Nitrogen Trifluoride - An electrolytic cell which is partitioned into one or more anode chambers and cathode chambers by one or more partition walls between each anode chamber and cathode chamber, wherein each anode chamber comprises one or more anodes comprising an inner surface and an outer surface, and each cathode chamber comprises one or more cathodes, wherein the anode chamber and the cathode chamber are configured such that any one of the one or more cathodes is adjacent to the outer surface of the one or more anodes and there is no cathode adjacent to the inner surface of the one or more anodes; a molten salt electrolyte surrounding the one or more anodes and the one or more cathodes; at least one anode gas outlet for withdrawing gas from the anode chamber; and at least one cathode gas outlet for withdrawing gas from the cathode chamber.||08-27-2015|
|20150240023||Catalyst Compositions and Methods for Making Foam - A composition and process to make polyisocyanurate or polyurethane foam using a catalyst composition comprising at least one bismuth carboxylate catalyst and one or more co-catalysts selected from the group of alkali metal carboxylates and quaternary ammonium carboxylate salts, such that the resultant foam has improved insulation properties. The polyisocyanurate or polyurethane foams produced by this catalyst composition and method are useful for laminated boardstock, construction panels, appliance insulation, and spray-applied insulation.||08-27-2015|
Patent applications by AIR PRODUCTS AND CHEMICALS, INC.